![[New] Vacuum Low-Profile High-Precision Module (CKLA 95V Series)](https://www.isdn-precision.com/archive/image/product1/images/95vbig01.png)
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![[New] Vacuum Low-Profile High-Precision Module (CKLA 95V Series)](https://www.isdn-precision.com/archive/image/product1/images/95vbig03.png)
![[New] Vacuum Low-Profile High-Precision Module (CKLA 95V Series)](https://www.isdn-precision.com/archive/image/product1/images/95vsmall01.png)
![[New] Vacuum Low-Profile High-Precision Module (CKLA 95V Series)](https://www.isdn-precision.com/archive/image/product1/images/95vsmall02.png)
![[New] Vacuum Low-Profile High-Precision Module (CKLA 95V Series)](https://www.isdn-precision.com/archive/image/product1/images/95vsmall03.png)
[New] Vacuum Low-Profile High-Precision Module (CKLA 95V Series)
- Vacuum level 10⁻⁸ mbar
- Min. thickness per axis 33 mm
- Superb linear motor thermal dissipation technology
- Cross-roller guides & vacuum-compatible materials
- Custom ultra-thin ironless linear motor
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ISDN Precision System will exhibit at the Automation Taipei 2026
The Vacuum Low-Profile High-Precision Module (CKLA 95V Series) will be demonstrated at the booth. Industry professionals are invited to visit Booth K628 on the 1st floor of Taipei Nangang Exhibition Center, Hall 1. Engineering team will be on site to provide demonstrations and technical consultations.
- ISDN Precision System's Linear Motor Thermal Dissipation TechnologyEnsuring stable operation even under constrained cooling conditions.
- Precision & Stability: High Accuracy Down to the Nanometer RangeThe crossed-roller guide provides outstanding structural rigidity, allowing the module handle vertical loads, side forces, and torque without deformation. The motion is smooth, and the friction is negligible.
- Utilized Vacuum-compatible MaterialsVacuum-compatible materials and components minimize outgassing and contamination risks.
- Powered by Custom Ultra-thin Ironless Linear Motor33 mm single-axis profile for confined spaces. Stackable structure for single axis or XY configuration.
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- Popular ApplicationsPrecision wafer inspection & alignment, precision Wafer Pre-Grinding Alignment, precision alignment for vacuum coating of medical implants
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Highly customizable. For more demanding specifications, please reach out to us.
左右尚有資訊Repeatability (μm) ± 0.5 Straightness (μm) ± 2 Flatness (μm) ± 4 Stroke (mm) 36 Max. acceleration (m/s²) 3 Max. speed (m/s) 0.1 Payload (kg) 5
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Description
ISDN Precision System will exhibit at the Automation Taipei 2026
The Vacuum Low-Profile High-Precision Module (CKLA 95V Series) will be demonstrated at the booth. Industry professionals are invited to visit Booth K628 on the 1st floor of Taipei Nangang Exhibition Center, Hall 1. Engineering team will be on site to provide demonstrations and technical consultations.
- ISDN Precision System's Linear Motor Thermal Dissipation TechnologyEnsuring stable operation even under constrained cooling conditions.
- Precision & Stability: High Accuracy Down to the Nanometer RangeThe crossed-roller guide provides outstanding structural rigidity, allowing the module handle vertical loads, side forces, and torque without deformation. The motion is smooth, and the friction is negligible.
- Utilized Vacuum-compatible MaterialsVacuum-compatible materials and components minimize outgassing and contamination risks.
- Powered by Custom Ultra-thin Ironless Linear Motor33 mm single-axis profile for confined spaces. Stackable structure for single axis or XY configuration.
-
- Popular ApplicationsPrecision wafer inspection & alignment, precision Wafer Pre-Grinding Alignment, precision alignment for vacuum coating of medical implants
-
Specifications
Highly customizable. For more demanding specifications, please reach out to us.
左右尚有資訊Repeatability (μm) ± 0.5 Straightness (μm) ± 2 Flatness (μm) ± 4 Stroke (mm) 36 Max. acceleration (m/s²) 3 Max. speed (m/s) 0.1 Payload (kg) 5