TGV Wafer Defect Inspection Solution
Description：
- Arc linear motor-based hollow rotary module
- 9-axis synchronization accuracy < 3 μm
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This was a highly challenging custom project that could easily take an entire technical presentation to fully explain. If you're interested in the engineering behind it, we'd happy to connect.
Our customer is a leading high-precision equipment manufacturer with strong vision software expertise, but struggled with the first-gen motion system architecture. The second-gen had to succeed — and that's where ISDN Precision System stepped in.
Motion system architecture- Top layer: 3-axis imaging module
- Middle layer: 3-axis hollow rotary module
- Bottom layer: 3-axis X-Ray module
The imaging and X-Ray module are precisely aligned to the hollow rotary module, paired with a Z axis for magnification control — enabling high-precision TGV wafer defect inspection.
Engineering challanges achieved- Arc linear motor-based hollow rotary moduleEnables > 360° continuous rotation without homing. Rotational flatness: ±15 μm.
- 9-axis synchronization accuracy < 3 μmAll nine axes operate in different coordinate systems. As the hollow rotary module rotates, all nine axes must maintain a common center with < 3 μm deviation.
- How do we eliminate cable entanglement in a > 360° continuous rotation system?
How is the overall accuracy maintained?
What communication interface supports this motion control solution?
What controller is implemented?
And yes — achieved without a granite base. - The development journey behind this project was as demanding as it was rewarding. If you'd like to learn more about the engineering details, feel free to reach out to us.
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If you'd like to learn more about the engineering details and the motion performance, feel free to reach out to us.
左右尚有資訊
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DescriptionThis was a highly challenging custom project that could easily take an entire technical presentation to fully explain. If you're interested in the engineering behind it, we'd happy to connect.
Our customer is a leading high-precision equipment manufacturer with strong vision software expertise, but struggled with the first-gen motion system architecture. The second-gen had to succeed — and that's where ISDN Precision System stepped in.
Motion system architecture- Top layer: 3-axis imaging module
- Middle layer: 3-axis hollow rotary module
- Bottom layer: 3-axis X-Ray module
The imaging and X-Ray module are precisely aligned to the hollow rotary module, paired with a Z axis for magnification control — enabling high-precision TGV wafer defect inspection.
Engineering challanges achieved- Arc linear motor-based hollow rotary moduleEnables > 360° continuous rotation without homing. Rotational flatness: ±15 μm.
- 9-axis synchronization accuracy < 3 μmAll nine axes operate in different coordinate systems. As the hollow rotary module rotates, all nine axes must maintain a common center with < 3 μm deviation.
- How do we eliminate cable entanglement in a > 360° continuous rotation system?
How is the overall accuracy maintained?
What communication interface supports this motion control solution?
What controller is implemented?
And yes — achieved without a granite base. - The development journey behind this project was as demanding as it was rewarding. If you'd like to learn more about the engineering details, feel free to reach out to us.
-
Specifications
If you'd like to learn more about the engineering details and the motion performance, feel free to reach out to us.
左右尚有資訊