XYZ Theta Gantry
Description：
- Integrated with passive vibration isolation system
- Customized mechatronics solution
-
- 8-inch Wafer AOI Inspection SystemIn wafer manufacturing, even the smallest defect—micro-cracks, scratches, pinholes, or particle contamination—can snowball into yield loss and higher costs. That’s why the precision, stability and vibration resistance of the gantry are the backbone of any AOI system. Only when solid hardware meets powerful AI and imaging algorithms can defect detection truly level up.
- Powered by ISDN Precision System's ISKM Series ironless linear motors for smooth motion and high-accuracy positioning.
- Passive Vibration Isolation SystemMinimizes vibration to protect imaging and measurement quality.
- Customized Mechatronics SolutionControl cabinet, wiring layout, and machine enclosure — all delivered as one cohesive system.
- End-to-end Tech SupportAlignment, tuning, testing, and parameter setup handled end-to-end to ensure stable performance on site.
- This ODM example from ISDN Precision System was carried out to customer specifications—including design, drafting, assembly, and laser interferometer testing—demonstrating our one‑stop, end‑to‑end development capability.
-
Highly customizable. For more demanding specifications, please reach out to us.
左右尚有資訊Stroke (mm) Y Axis (Bottom Axis) 1100; Z Axis (Top Axis) 600; Theta Axis 150 Repeatability (μm) ±0.5 Straightness (μm) ±3 Flatness (μm) ±3
-
Description
- 8-inch Wafer AOI Inspection SystemIn wafer manufacturing, even the smallest defect—micro-cracks, scratches, pinholes, or particle contamination—can snowball into yield loss and higher costs. That’s why the precision, stability and vibration resistance of the gantry are the backbone of any AOI system. Only when solid hardware meets powerful AI and imaging algorithms can defect detection truly level up.
- Powered by ISDN Precision System's ISKM Series ironless linear motors for smooth motion and high-accuracy positioning.
- Passive Vibration Isolation SystemMinimizes vibration to protect imaging and measurement quality.
- Customized Mechatronics SolutionControl cabinet, wiring layout, and machine enclosure — all delivered as one cohesive system.
- End-to-end Tech SupportAlignment, tuning, testing, and parameter setup handled end-to-end to ensure stable performance on site.
- This ODM example from ISDN Precision System was carried out to customer specifications—including design, drafting, assembly, and laser interferometer testing—demonstrating our one‑stop, end‑to‑end development capability.
-
Specifications
Highly customizable. For more demanding specifications, please reach out to us.
左右尚有資訊Stroke (mm) Y Axis (Bottom Axis) 1100; Z Axis (Top Axis) 600; Theta Axis 150 Repeatability (μm) ±0.5 Straightness (μm) ±3 Flatness (μm) ±3