Compact XY Stage
Description：
- Cross-roller guides for exceptional dynamic performance
- Stackable structure
-
- 12-inch Wafer Alignment ApplicationPaired with cross-roller guides and ironless linear motors, it delivers ultra-smooth motion and meets the stringent accuracy demands of 12-inch wafer alignment equipment.
- Stackable structureOur customer faced a classic challenge—extremely limited installation space, while still requiring X-Y motion, room to integrate a Theta axis, and sufficient clearance for operation. Designed with a stackable architecture, this Compact XY Stage is purpose-built for space-constrained and high-precision equipment.
-
Highly customizable. For more demanding specifications, please reach out to us.
左右尚有資訊Y Axis (Bottom axis) X Axis (Top axis) Repeatability (μm) ±1 ±1 Straightness (μm) ±3 ±3 Flatness (μm) ±3 ±3 Stroke (mm) 28 28 Velocity (m/s) 0.5 0.5
-
Description
- 12-inch Wafer Alignment ApplicationPaired with cross-roller guides and ironless linear motors, it delivers ultra-smooth motion and meets the stringent accuracy demands of 12-inch wafer alignment equipment.
- Stackable structureOur customer faced a classic challenge—extremely limited installation space, while still requiring X-Y motion, room to integrate a Theta axis, and sufficient clearance for operation. Designed with a stackable architecture, this Compact XY Stage is purpose-built for space-constrained and high-precision equipment.
-
Specifications
Highly customizable. For more demanding specifications, please reach out to us.
左右尚有資訊Y Axis (Bottom axis) X Axis (Top axis) Repeatability (μm) ±1 ±1 Straightness (μm) ±3 ±3 Flatness (μm) ±3 ±3 Stroke (mm) 28 28 Velocity (m/s) 0.5 0.5